New materials and corrosive gas technology
Aligned with the International Technology Roadmap for Semiconductors (ITRS), past and recent developments at our San Marcos (US) facility include ultra-pure tungsten hexafluoride (WF6) and novel precursors for high-k ALD processes.
Rare and halogen gases
Enabling developments in deep ultraviolet (DUV) lithography, our Alpha (US) plant has pioneered high-purity halogen gas mixtures for 248nm and 193nm excimer lasers. Additional areas of expertise include xenon recycling and isotopically enriched gases and chemicals.
Fluorine technology for clean chamber cleaning
Our Inju (Korea) facility is pioneering the latest generation of low-cost, modular fluorine generators. This zero-carbon technology is growing in importance as the industry faces increasingly stringent environmental legislation.
We are also involved in joint development programmes with major customers, OEMs, academic bodies and industry consortia.
Full spectrum
We offer the full range of gases to support all semiconductor manufacturing processes:
Ultra-pure bulk gases
On-Site gas generators
Electronic special gases in cylinder and bulk supply.
| Bulk gases for Electronics | Electronic special gases |
| Nitrogen | Silicon source gases |
| Hydrogen | Nitride / oxide growth |
| Argon | Doping and implants |
| Oxygen | Metal and dielectric etch |
AUECC, a Linde Group company, specialises in the manufacture and distribution of ultra-pure wet chemicals for the global microelectronics industry. Discover more.
Systems and service expertise
In addition, we offer a wide range of professional services to allow you to focus on your core business and keep operations up and running. These extend from turnkey design and installation services to end-to-end management of your gas systems and include:
Bulk gas storage and distribution systems
Bulk special gas systems (BSGS)
Gas cabinets and gas distribution manifolds
Total gas & chemical management.
Market segments